Citation:
Alex Naiman, Desiatov, Boris , Stern, Liron , Mazurski, Noa , Shappir, Joseph , and Levy, Uriel . 2015. “Ultrahigh-Q Silicon Resonators In A Planarized Local Oxidation Of Silicon Platform”. Optics Letters. doi:10.1364/ol.40.001892.
Abstract:
© 2015 Optical Society of America. We describe a platform for the fabrication of smooth waveguides and ultrahigh-quality-factor (Q factor) silicon resonators using a modified local oxidation of silicon (LOCOS) technique. Unlike the conventional LOCOS process, our approach allows the fabrication of nearly planarized structures, supporting a multilayer silicon photonics configuration. Using this approach we demonstrate the fabrication and the characterization of a microdisk resonator with an intrinsic Q factor that is one of the highest Q factors achieved with a compact silicon-on-insulator platform.