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Manufacturer and model:
Metal Evaporator TFDS-462B, VST Ltd.
General Information:
Physical Vapor Deposition of metallic layers up to 200nm thickness
Key Features:
- E-gun Telemark 6 pockets 7cc
- Two thermal sources
- Sample Holder up to 150mm diameter
- Rotating and Cooled Sample Holder
- Cryopump Vacuum System
- Base Pressure = 3 x 10-7 Torr
- Deposition Controller Telemark
Applications:
- Lift-off Depositions
- Contact Depositions
- Stack of different deposited layers
Materials:
Ti, Cr, Au, Pd, Pt, Ta, Ge, Ag, Ni, Al, SiO2, Al2O3
Start of Operation Date:
July 2007