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Manufacturer and model:
High Resolution Scanning Electron Microscope Sirion XL30 SFEG (ThermoFisher, former FEI)
General Information:
HR SEM Sirion is a versatile tool for advanced studies in the areas of materials science, semi-conductors, various types of electronic devices, failure analysis and life-science. The microscope uses Shottky type Field Emission Source and allows wide range of accelerating voltages from 200 V to 30 kV. It is able to achieve resolutions of 1.5 nm at > 10 kV and 2.5 nm at 1 kV. The microscope has complete set of detectors providing imagining in secondary and back-scattered electrons including Through-the-Lens detector with variable bias for high resolution observation. The system is optimized for operation at low kV, allowing un-coated and isolating materials to be examined with minimum charging. Sirion provides high spatial resolution structural research and high resolution analytical work with the energy dispersive X-ray spectroscopy (EDS), cathodoluminiscence (CL), electron back-scattered diffraction (EBSD) and electron beam induced current (EBIC).
Key Features:
HR SEM Sirion is a high vacuum instrument with the Schottky-type FEG. Its EDS system was upgraded in 2010 to the Oxford XMAX SDD operated under INCA Energy 450 platform. Its EDAX EBSD system was upgraded in 2017 to DigiView5 EBSD camera system operated under OIM AnalysisTM v8. GATAN MonoCL3 system for cathodoluminiscence imaging and spectroscopy was installed in 2003 and is operated by Digital Micrograph. The instrument is routinely operated with a room temperature 5-axis motorized stage which could be replaced by the 3-axis manual liquid He cooled GATAN C302 stage for low temperature signal acquisition and/or Electron Beam Current (EBIC) imaging.
Start of Operation Date:
February 2003