@article {27143,
	title = {Atomic Layer Deposition of Piezoelectric Materials: A Timely Review},
	journal = {Atomic Layer Deposition of Piezoelectric Materials: A Timely Review, Materials Today Energy},
	volume = {https://doi.org/10.1016/j.mtener.2023.101457},
	year = {2023},
	author = {Yun Li and Goei, Ronn and Ong, Amanda Jiamin and Yiming Zou and Adva Shpatz Dayan and Stav Rahmany and lioz etgar and Tok, Alfred Iing Yoong}
}
